Assistant Professor, Nanomechanics Laboratory, Department of Mechanical Engineering, School of Engineering, The University of Tokyo
Associate Program Manager, Impulsing Paradigm Change through Disruptive Technologies Program, (ImPACT, Goverment of Japan), Japan Science and Technology Agency (JST)
Visiting Researcher, Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST)
Member, Japan Society of Applied Physics (JSAP)
Contact
63B2, Eng. Build. 2, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-8656
[ID: maeda.etsuo] [Domain: fml.t.u-tokyo.ac.jp]
K's Gobancho, 7, Gobancho, Chiyodaku, Tokyo, 102-0076
[ID: etsuo.maeda] [Domain: jst.go.jp]
Research
Keywords: Plasmonics, Scattering, Sub-Wavelength Periodic Structure, Spectroscopy, Nanomechanics, Helium Ion Beam, Focused Ion Beam
Sho Mikuriya, Etsuo Maeda, Masaki Shuzo, Ichiro Yamada, and Jean-Jacques Delaunay, “Hydrogen sensing with a rectangular lattice of sub-wavelength holes in palladium,” IEEJ, Transaction on Sensors and micromachines, 130-E, 317, 2010.
Etsuo Maeda, Takanori Matsuki, Ichiro Yamada, and Jean-Jacques Delaunay, “Hole shape effect induced optical response to permittivity change in palladium sub-wavelength hole arrays upon hydrogen exposure,” Journal of Applied Physics, 111, 084502, 2012.
Miao Zhong, Yukio Sato, Mario Kurniawan, Aleksandra Apostoluk, Bruno Masenelli, Etsuo Maeda, Yuichi Ikuhara, and Jean-Jacques Delaunay, “ZnO dense nanowire array on a film structure in a single crystal domain texture for optical and photoelectrochemical applications,” Nanotechnology, 23, 495602, 2012.
Etsuo Maeda, Yaerim Lee, Youjiro Kobayashi, Akiko Taino, Mari Koizumi, Shigenori Fujikawa, and Jean-Jacques Delaunay, “Sensitivity to refractive index of high aspect-ratio nano-fins with optical vortex,” Nanotechnology, 23, 505502, 2012.
Ya-Lun Ho, Yaerim Lee, Etsuo Maeda, and Jean-Jacques Delaunay, “Coupling of localized surface plasmons to U-shaped cavities for high-sensitivity and miniaturized detectors,” Optics Express, 21, 1531, 2013.
Yaerim Lee, Etsuo Maeda, Ya-Lun Ho, Shigenori Fujikawa, Jean-Jacques Delaunay, “High sensitivity refractive index sensing with strong light confinement in high-aspect-ratio U-cavity arrays,” Sensors and Actuators B, 137, 202, 2014.
Etsuo Maeda, Reo Kometani, Sunao Ishihara, and Jean-Jacques Delaunay, “Sub-wavelength palladium antenna arrays for hydrogen optical detection in the infrared region,” Japanese Journal of Applied Physics, 53, 037001, 2014.
Ya-Lun Ho, Alejandro Portela, Yaerim Lee, Etuso Maeda, Hitoshi Tabata, and Jean-Jacques Delaunay, “Hollow Plasmonic U-Cavities with High-Aspect-Ratio Nanofins Sustaining Strong Optical Vortices for Light Trapping and Sensing” Advanced Optical Materials, 2, 522 2014.
Tatsuya Baba, Yaerim Lee, Ai Ueno, Ryo Takigawa, Reo Kometani,and Etsuo Maeda, “Triple-walled gold surfaces with small-gaps for non-resonance surface enhanced Raman scattering of rhodamine 6G molecules”, Journal of Vacuum Science and Technology B, 34, 011802, 2016.
Etsuo Maeda and Reo Kometani "Sub-Picometer Multi-Wavelength Detector Based On Highly Sensitive Nanomechanical Resonator", Applied Physics Letters in press
Etsuo Maeda, Koichi Endo, Sho Mikuriya, Masaki Shuzo, Ichiro Yamada, and Jean-Jacques Delaunay, “Analysis of hydrogen exposure effects on the transmittance of periodic sub-wavelength palladium hole arrays,” Proc. of SPIE, 7218, 72181C, 2009.
Etsuo Maeda, Sho Mikuriya, Ichiro Yamada, and Jean-Jacques Delaunay, “Hydrogen absorption effects on the transmittance of sub-wavelength palladium hole arrays with different thicknesses,” Proc. of SPIE, 7941, 79410O, 2011.
Stanislas Vertu, Etsuo Maeda, Jens Flugge, Jean-Jacques Delaunay, and Olivier Haeberle, “Comparison of resolution in tomographic diffractive microscopy using combinations of sample rotation and illumination rotation,” Proc. of SPIE, 7904, 79041O, 2011.
Etsuo Maeda, Takanori Matsuki, Ichiro Yamada, and Jean-Jacques Delaunay, “Array of subwavelength rectangular structures in palladium for optical hydrogen detection,” Proc. of SPIE, 8264, 82640N, 2012.
Etsuo Maeda, Takanori Matsuki, Ichiro Yamada, and Jean-Jacques Delaunay, “Electric field design of metallic sub-wavelength hole arrays for optical permittivity sensing,” IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 2012, doi: 10.1109/NEMS.2012.6196786.
Miao Zhong, Alexandra Apostoluk, Etsuo Maeda, Georges Bremond, Jean-Jacques Delaunay, “Spectroscopic determination of the flatband potential and carrier density of ZnO nanowire array with/without hydrogen plasma treatment,” Proc. SPIE, 8263, 82631A, 2012.
Etsuo Maeda, Yaerim Lee, Youjiro Kobayashi, Ya-Lun Ho, Shigenori Fujikawa, and Jean-Jacques Delaunay, “A 3D metallic strucutre array for refractive index sensing with optical vortex,” IEEE Micro Electro Mechanical Systems (MEMS) 2013, doi: 10.1109/MEMSYS.2013.6474409.
Ya-Lun Ho, Yaerim Lee, Etsuo Maeda, and Jean-Jacques Delaunay, “Localized surface plasmons coupled to U-shaped cavity for high sensitivity bio-sensing applications,” International Symposium on Olfaction & Electronic Nose 2013, Daegu, Korea, July, 2013.
Etsuo Maeda, “Fabrication technology for three dimensional metallic photonic crystal slab,” IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 2014, doi: 10.1109/NEMS.2014.6908869.
Etsuo Maeda, Reo Kometani, “Sensitivity of Nanomechanical Resonator with Gold Nano- Fin Array for Wavelength and Power Detection,” Nano/Micro Engineered and Molecular Systems (NEMS), 2016.
Etsuo Maeda, Sho Mikuriya, Masaki Shuzo, Ichiro Yamada, and Jean-Jacques Delaunay, “Palladium sub-wavelength hole arrays for hydrogen sensing,” NATO Advanced Research Workshop, META'10, Cairo, Egypt, 22-25 February, 2010.
M. Zhong, M. Kurniawan, A. Apostoluk, A. Sibai, G. Bremond, E. Maeda, J.-J. Delaunay, “Metal-oxide core-shell nanowire array on a film structure for efficient and stable photoelectrochemical water splitting,” International Workshop on ZnO and related materials, Nice, September 11-14, 2012.
Ya-Lun Ho, Yaerim Lee, Etsuo Maeda, and Jean-Jacques Delaunay, “Localized Surface Plasmons Coupled in U-Shaped Nano-Cavity with High Sensitivity,” CLEO-PR & OECC/PS 2013, Kyoto, Japan, July, 2013.
Reo Kometani, Masanobu Sato, Xiao Chen, Takahito Ono, Etsuo Maeda, Shohei Chiashi,and Shigeo Maruyama, “Q Factor Enhancement of Grapheme Mechanical Resonator by Fluorine Surface Modification,” The 40th Micro and Nano Engineering, The Swiss Tech Convention Center, Lausanne, Switzerland, 2014.
Yuto Miyata, Sinichi Warisawa, Sunao Ishihara, Etsuo Maeda, and Reo Kometani, “The Relationship between Fabrication and Resonant Properties of Nanomechanical Resonator Fabricated by FIB/EB Dual Beam Lithography,” 27th International Microprocesses and Nanotechnology Conference (MNC2014), 7p-11-95, Hilton Fukuoka Sea Hawk, Fukuoka, 2014.
Tatsuya Baba, Yaerim Lee, Ai Ueno, Ryo Takigawa, R. Kometani, and E. Maeda, “Triple-Walled Gold Structures with Nano-Gaps for Non-Resonance Surface Enhanced Raman Scattering of Rhodamine 6G Molecules,” 27th International Microprocesses and Nanotechnology Conference (MNC2014), 7p-11-95, Hilton Fukuoka Sea Hawk, Fukuoka, 2014.
Reo Kometnai, Yuto Miyata, Etsuo Maeda, “Characterization of mechanical properties of the carbon mechanical nanostructure fabricated from SU-8 resist by FIB/EB dual-beam lithography,” The 59th International Conference on Electron, Ion and Photon Beam Technology & Nanofabrication(EIPBN2015), P07-04, Manchester Grand Hyatt, San Diego, US, 2015.
Etsuo Maeda, Reo Kometani, “Narrowband Photonic Absorber with Nano-Fins in Near-Infrared Region for Wavelength Detection with Mechanical Resonator,” The 59th International Conference on Electron, Ion and Photon Beam Technology & Nanofabrication(EIPBN2015), P14-04, Manchester Grand Hyatt, San Diego, US, 2015.
Reo Kometani, Takumi Miyakoshi,and Etsuo Maeda, “Effect of fluorine surface modification on resonance of a carbon nanoresonator fabricated by FIB/EB dual-beam lithography,” Tue-C1-c9, 41th International Conference on Micro and Nano Engineering (MNE2015), World Forum, The Hauge, The Netherlands, 2015.
Jun Oishi, Masataka Goto, Hiroshi Yamaguchi, Etsuo Maeda, and Reo Kometani, “A minimal optical Yagi-uda nanoantenna array for wavelength detection with optmechanical resonator,” Tue-C-p92, 41th International Conference on Micro and Nano Engineering (MNE2015), World Forum, The Hauge, The Netherlands, 2015.
Masataka Goto, Etsuo Maeda, and Reo Kometani, “An optical absorber for optical detection device with two-interface surface plasmonic structure,” Tue-C-p46, 41th International Conference on Micro and Nano Engineering (MNE2015), World Forum, The Hauge, The Netherlands, 2015.
Takahiro Murakami, Etsuo Maeda, and Reo Kometani, “Gold-assisted chemical etching of silicon dioxide technique and application for micro-pattering,” Tue-B-p30, World Forum, The Hauge, The Netherlands, 2015.
Reo Kometani, Koujiro Kosugi, K. Tsushima, Shohei Chiashi, Shigeo Maruyama, and Etsuo Maeda, “Influence of Focused-Ion-Beam Process and Annealing Treatment on Resonance of Graphene Nanomechanical Resonator,” 12D-6-5, 28th International Microprocesses and Nanotechnology Conference (MNC2015), Toyama International Conference Center, Toyama, Japan, 2015.
Etsuo Maeda and Reo Kometani, “Photonic Absorber with Nano-Fins for Wavelength Detection with Mechanical Resonator in Near-infrared Region,” 12P-7-80, 28th International Microprocesses and Nanotechnology Conference (MNC2015), Toyama International Conference Center, Toyama, Japan, 2015.
Masato Okuno, Reo Kometani, and Etsuo Maeda “In-Plane Optical Power Flow Control with Nano-Fabricated Plasmonic Structures for Micro Total Analysis Systems,”p37, The 60th International Conference on Electron, Ion and Photon Beam Technology & Nanofabrication(EIPBN2016), Pittsburgh, 2016.
前田悦男,三栗谷祥,酒造正樹,山田一郎,ジャン=ジャック・ドロネー, ``パラジウム薄膜サブ波長周期構造体を用いた水素ガスセンサの厳密結合波理論による数値解析," 化学とマイクロ・ナノシステム研究会, CHEMINAS 19th, May, 2009 [ポスター].
前田悦男, 遠藤弘一, 三栗谷祥, 酒造正樹, 山田一郎, ジャン=ジャック・ドロネー, ``サブ波長穴配列を有するパラジウム薄膜における異常透過現象の数値解析," Society of Nano Science and Technology, ナノ学会 第7回 大会, May, 2009 [ポスター].
WO 2011/027899 A1, Atsushi Suda, Jean-Jacques Delaunay, Etsuo Maeda, Ichiro Yamada, "Surface plasmon resonance element for hydrogen detection, surface plasmon resonance-type optical hydrogen detector, and method for optically detecting hydrogen by using surface plasmon resonance".
2010-2012 Research Fellowships for Young Scientists DC2, Japan Society for the Promotion of Science (JSPS)
2013-2015 Grant-in-Aid for Young Scientists B, Japan Society for the Promotion of Science (JSPS)
2015-2017 Challenging Exploratory Research, Japan Society for the Promotion of Science (JSPS)
2016-2018 Grant-in-Aid for Young Scientists A, Japan Society for the Promotion of Science (JSPS)
2014-2014 Toyota Physical adn Chemical Research Institute Scholars, Toyota Physical and Chemical Research Institute
2015-2016 Joint Research, Aero-Engine and Space Operations, IHI Corporation
2016-2017 Nanotch Career-up Aliance, Nanotech Research Proffesional (CUPAL NRP), Building of Consortia for the Development of Human Resources in Science and Technology, Japan Science and Technology Agency (JST)
Classes
学部:機械工学総合演習第一(材料の破壊と変形)FY2014-2016
学部:機械工学総合演習第二(スターリングエンジン設計・制作のうち設計)FY2015-2016
学部:創造設計演習(デジタルエンジニアリング演習のうち振動設計)FY2013-2016
大学院:工学コンピテンシーI(Project Based Learning, English)FY2012-2016